The role of plasma negative ions in plasma anodization
- 1 October 1972
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 12 (2), 427-432
- https://doi.org/10.1016/0040-6090(72)90107-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- NEGATIVE ION EXTRACTION FROM THE PLASMA DURING ANODIZATION IN THE dc OXYGEN DISCHARGEApplied Physics Letters, 1971
- Plasma Anodization of Metals and SemiconductorsJournal of Vacuum Science and Technology, 1970
- Ionic Current as a Function of Field in the Oxide during Plasma Anodization of Tantalum and NiobiumJournal of the Electrochemical Society, 1970
- The Estimation of Field Strengths in the Oxide during Conventional and Plasma AnodizationJournal of the Electrochemical Society, 1970
- Electron energy distributions in plasmas IV. Oxygen and nitrogenProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1961