NEGATIVE ION EXTRACTION FROM THE PLASMA DURING ANODIZATION IN THE dc OXYGEN DISCHARGE
- 15 June 1971
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 18 (12), 554-556
- https://doi.org/10.1063/1.1653537
Abstract
This letter describes an experiment which demonstrates that negative ions in the oxygen discharge are the source of the oxygen incorporated in the anodic oxide. By use of time‐varying electric fields, negative oxygen ions are eliminated from the anodizing current. Under this condition, film growth is not observed.Keywords
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