Scanning Ion Microscopy and Ion Beam Micro-machining
- 1 August 1967
- journal article
- Published by Springer Nature in Nature
- Vol. 215 (5104), 950-952
- https://doi.org/10.1038/215950a0
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- The relative abundance of the lithium isotopes in the Holbrook meteoriteGeochimica et Cosmochimica Acta, 1965
- A theoretical assessment of the possibility of selected-area mass-spectrometric analysis using a focused ion beamBritish Journal of Applied Physics, 1965
- Atomic and Ionic Impact Phenomena on Metal SurfacesPublished by Springer Nature ,1965
- Mass spectrometer for the study of sputteringVacuum, 1964
- Sputtering Ion Source for SolidsJournal of Applied Physics, 1963
- Mass Analysis of Sputtered ParticlesJournal of Applied Physics, 1963
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- Wide-band detector for micro-microampere low-energy electron currentsJournal of Scientific Instruments, 1960
- Duo Plasmatron Ion Source for Use in AcceleratorsReview of Scientific Instruments, 1959