Laser annealing of arsenic implanted silicon
- 2 May 1977
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 61 (3), 181-182
- https://doi.org/10.1016/0375-9601(77)90286-9
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Dislocation reactions in arsenic-implanted and annealed siliconPhysica Status Solidi (a), 1976
- Residual lattice damage in As-implanted and annealed SiJournal of Vacuum Science and Technology, 1976
- Influence of thermal history on the residual disorder in implanted siliconRadiation Effects, 1976