Atomic layer deposition (ALD): from precursors to thin film structures
Top Cited Papers
- 1 April 2002
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 409 (1), 138-146
- https://doi.org/10.1016/s0040-6090(02)00117-7
Abstract
No abstract availableThis publication has 80 references indexed in Scilit:
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