High Resolution Electron Beam Fabrication Using STEM
- 1 August 1978
- journal article
- Published by Cambridge University Press (CUP) in Proceedings, annual meeting, Electron Microscopy Society of America
- Vol. 36 (3), 343-354
- https://doi.org/10.1017/s0424820100070102
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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