A comparative study of wet and dry selective etching processes for GaAs/AIGaAs/lnGaAs pseudomorphic MODFETs
- 1 January 1992
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 21 (1), 9-15
- https://doi.org/10.1007/bf02670914
Abstract
No abstract availableKeywords
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