Ionized-cluster beam deposition and epitaxy
- 1 March 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 58 (1), 9-19
- https://doi.org/10.1016/0040-6090(79)90199-8
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Solar cells fabricated by ionised-cluster beam technologyIEE Journal on Solidstate and Electron Devices, 1978
- Ionized-cluster beam deposition and epitaxy as fabrication techniques for electron devicesThin Solid Films, 1977
- An evaluation of metal and semiconductor films formed by ionized-cluster beam depositionThin Solid Films, 1976
- Effect of ion irradiation on the formation, structure and properties of thin metal filmsThin Solid Films, 1976
- Ionized-cluster beam depositionJournal of Vacuum Science and Technology, 1975
- Magnetic Properties of Single Crystal MnBi PlateletJapanese Journal of Applied Physics, 1973