Amorphous-to-crystalline transition of indium oxide films deposited by reactive evaporation
- 1 August 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 151 (2), 215-222
- https://doi.org/10.1016/0040-6090(87)90235-5
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Heat-resisting and efficient indium oxide/indium phosphide heterojunction solar cellsJournal of Applied Physics, 1985
- Optical recording applications of reactive ion beam sputter deposited thin-film compositesApplied Physics Letters, 1984
- Optical properties of transparent and heat-reflecting indium tin oxide films: The role of ionized impurity scatteringApplied Physics Letters, 1984
- Evaporation of High Quality In2 O 3 Films from In2 O 3 / In Source—Evaporation Chemistry and ThermodynamicsJournal of the Electrochemical Society, 1981
- Preparation of conducting and transparent thin films of tin-doped indium oxide by magnetron sputteringApplied Physics Letters, 1980
- n-In2O3/p-InP solar cellsSurface Science, 1979
- Preparation of Sn-doped In2O3 (ITO) films at low deposition temperatures by ion-beam sputteringApplied Physics Letters, 1979
- Effects of heat treatment on the optical and electrical properties of indium–tin oxide filmsJournal of Applied Physics, 1978
- Properties of Sn‐Doped In2 O 3 Films Prepared by RF SputteringJournal of the Electrochemical Society, 1975
- Characterization of transparent conductive thin films of indium oxideJournal of Vacuum Science and Technology, 1975