Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers
- 1 April 2002
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 97-98, 457-461
- https://doi.org/10.1016/s0924-4247(01)00829-9
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Fabrication process of high aspect ratio elastic structures for piezoelectric motor applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A New Micro Pneumatic Actuator for Micromechanical SystemsPublished by Springer Nature ,2001
- All-photoplastic, soft cantilever cassette probe for scanning force microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Soft, entirely photoplastic probes for scanning force microscopyReview of Scientific Instruments, 1999
- Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor componentsMicrosystem Technologies, 1998
- Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resistMicrosystem Technologies, 1998
- Mechanical characterization of a new high-aspect-ratio near UV-photoresistMicroelectronic Engineering, 1998
- High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMSSensors and Actuators A: Physical, 1998
- SU-8: a low-cost negative resist for MEMSJournal of Micromechanics and Microengineering, 1997
- Micromachining applications of a high resolution ultrathick photoresistJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995