Simple model for surface composition changes of alloys and compounds by'ion bombardment
- 1 January 1979
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 43 (4-5), 149-153
- https://doi.org/10.1080/01422447908229241
Abstract
Surface composition change of binary alloys and compounds is calculated in a first approximation by considering preferential sputtering and knock-on effect. It is shown that this produces an ion energy dependence term in the equation of the composition change at low energy.Keywords
This publication has 11 references indexed in Scilit:
- Preferential sputtering of Cu-Ni alloys at low temperature using lower energy auger electron spectra∗Surface Science, 1979
- On the use of the Brinkman cross section for sputtering yields of argon ions on a polycrystalline copper targetPhysics Letters A, 1978
- Sputtering of an AgAu alloy by bombardment with 6 keV Xe+ionsJournal of Physics D: Applied Physics, 1978
- An attempt to understand preferential sputteringNuclear Instruments and Methods, 1978
- Preferential sputtering of binary alloys with diffusion: The equilibrium distributionRadiation Effects, 1978
- A model for surface layer composition changes in sputtered alloys and compoundsApplied Physics Letters, 1977
- Surface-layer composition changes in sputtered alloys and compoundsApplied Physics Letters, 1977
- Auger study of preferred sputtering on binary alloy surfacesSurface Science, 1976
- Sputtering—a review of some recent experimental and theoretical aspectsApplied Physics A, 1975
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969