Structural characterization of GaInAs(P)/InP quantum well structures grown by gas source molecular beam epitaxy

Abstract
We have carried out an x-ray study of 20-well quaternary InGaAsP/InP and ternary InGaAs/InP structures grown on [100]InP by gas source molecular beam epitaxy (GSMBE). The multilayers were found to grow laterally coherent and very closely lattice matched in the [100] growth direction. The presence of well-defined higher order harmonics in the high-resolution x-ray diffraction confirms the excellent quality of InGaAs(P)/InP superlattices grown by the GSMBE technique.