Oxide thickness measurements up to 120 Å on silicon and aluminum using the chemically shifted auger spectra
- 2 December 1977
- journal article
- Published by Elsevier in Surface Science
- Vol. 69 (2), 385-402
- https://doi.org/10.1016/0039-6028(77)90122-4
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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