Measurement of KrF laser breakdown threshold in gases
- 1 January 1997
- journal article
- Published by Elsevier in Optics Communications
- Vol. 134 (1-6), 66-68
- https://doi.org/10.1016/s0030-4018(96)00543-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- X-ray lithography using a KrF laser-plasma source at hν ≈ 1 keVMicroelectronic Engineering, 1987
- KrF laser-induced breakdown of gasesOptics Communications, 1981
- Laser beam induced breakdown in helium and argonJournal of Physics D: Applied Physics, 1971
- Frequency Dependence of Optically Induced GAS BreakdownPhysical Review Letters, 1965