Numerical Investigation on the Flow and Temperature Fields in an Inductively Coupled Plasma Reactor
- 1 December 2000
- journal article
- Published by IOP Publishing in Plasma Science and Technology
- Vol. 2 (6), 565-571
- https://doi.org/10.1088/1009-0630/2/6/009
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Thermal PlasmasPublished by Springer Nature ,1994
- Modelling of a radio-frequency plasma torch including a self-consistent electromagnetic field formulationJournal of Physics D: Applied Physics, 1989
- AN ANALYSIS OF THE COMPUTER MODELING OF THE FLOW AND TEMPERATURE FIELDS IN AN INDUCTIVELY COUPLED PLASMANumerical Heat Transfer, 1985