Electrical conduction processes in silicon nitride thin films prepared by r.f. magnetron sputtering using nitrogen gas
- 1 November 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 355-356, 456-460
- https://doi.org/10.1016/s0040-6090(99)00550-7
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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