In situ determination of the structure of thin metal films by internal stress measurements: Structure dependence of silver and copper films on oxygen pressure during deposition
- 1 March 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 66 (2), 217-232
- https://doi.org/10.1016/0040-6090(80)90225-4
Abstract
No abstract availableKeywords
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