Modelling and optimization of micromachined silicon resonators
- 1 June 1995
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 5 (2), 103-105
- https://doi.org/10.1088/0960-1317/5/2/011
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Resonant silicon sensorsJournal of Micromechanics and Microengineering, 1991