Effect of the target on the structure and optical properties of radio-frequency sputtered barium titanate films
- 1 October 1988
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 7 (10), 1104-1106
- https://doi.org/10.1007/bf00720845
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- R.F. Sputtering of LiNbO3 thin filmsThin Solid Films, 1982
- Resputtering effects in Ba(Pb, Bi)O3 perovskitesJournal of Vacuum Science and Technology, 1980
- Refractive index of BaTiO3 and SrTiO3 filmsJournal of Applied Physics, 1977
- Behaviours of High-Energy Electrons and Neutral Atoms in the Sputtering of BaTiO3Japanese Journal of Applied Physics, 1975
- Characteristics of RF sputtered barium titanate thin filmsProceedings of the IEEE, 1971
- Oxygen-Octahedra Ferroelectrics. I. Theory of Electro-optical and Nonlinear optical EffectsJournal of Applied Physics, 1969