Capacitive silicon accelerometer with highly symmetrical design
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 312-315
- https://doi.org/10.1016/0924-4247(90)85062-9
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Micromechanical accelerometer integrated with MOS detection circuitryIEEE Transactions on Electron Devices, 1982
- A batch-fabricated silicon accelerometerIEEE Transactions on Electron Devices, 1979