Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films
- 1 July 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 247 (1), 15-23
- https://doi.org/10.1016/0040-6090(94)90470-7
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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