Combination of excimer laser micromachining and replication processes suited for large scale production
- 1 February 1995
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 86 (1-4), 251-258
- https://doi.org/10.1016/0169-4332(94)00386-6
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Excimer laser ablation of polyimide in a manufacturing facilityApplied Physics A, 1992
- Three-dimensional microfabrication using synchrotron radiationNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1991
- Photoablation of polyimide with IR and UV laser radiationApplied Surface Science, 1989
- Femtosecond uv excimer laser ablationApplied Physics B Laser and Optics, 1987
- Dynamics of UV laser ablation of organic polymer surfacesJournal of Applied Physics, 1986
- Ablative photodecomposition of polymer films by pulsed far‐ultraviolet (193 nm) laser radiation: Dependence of etch depth on experimental conditionsJournal of Polymer Science: Polymer Chemistry Edition, 1984