Ferroelectric properties of lead-zirconate-titanate films prepared by laser ablation
Open Access
- 24 June 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (25), 2910-2912
- https://doi.org/10.1063/1.104719
Abstract
Ferroelectric lead-zirconate-titanate (PZT) thin films have been deposited by excimer laser ablation on sapphire substrates with and without an electrode. In preparation for the films, O2 gas pressure has greatly influenced the film structure and morphology. For the first time, we have confirmed the ferroelectric properties of PZT films prepared by laser ablation without post-annealing. It appears to be possible to use these films for nonvolatile random access memories with some additional improvements in the film properties.Keywords
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