In situ detection of porosity initiation during aluminum thin film anodizing
- 16 February 2009
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 94 (7), 074103
- https://doi.org/10.1063/1.3081014
Abstract
High-resolution curvature measurements have been performed in situ during aluminum thin film anodizing in sulfuric acid. A well-defined transition in the rate of internal stress-induced curvature change is shown to allow for the accurate, real-time detection of porosity initiation. The validity of this in situ diagnostic tool was confirmed by a quantitative analysis of the spectral density distributions of the anodized surfaces. These were obtained by analyzing ex situ atomic force microscopy images of surfaces anodized for different times, and allowed to correlate the in situ detected transition in the rate of curvature change with the appearance of porosity.Keywords
This publication has 17 references indexed in Scilit:
- Stress‐driven transport in ordered porous anodic filmsPhysica Status Solidi (a), 2008
- On the contribution of electrostriction to charge-induced stresses in anodic oxide filmsElectrochimica Acta, 2008
- Stress generated porosity in anodic alumina formed in sulphuric acid electrolyteCorrosion Science, 2007
- Monitoring the Progressive Development of an Anodized Film on AluminumJournal of the Electrochemical Society, 2007
- Formation of self-organized nanoscale porous structures in anodic aluminum oxidePhysical Review B, 2006
- One‐Dimensional Nanostructures: Synthesis, Characterization, and ApplicationsAdvanced Materials, 2003
- Hexagonal pore arrays with a 50–420 nm interpore distance formed by self-organization in anodic aluminaJournal of Applied Physics, 1998
- Measuring Ge segregation by real-time stress monitoring during Si1−xGex molecular beam epitaxyApplied Physics Letters, 1996
- Ordered Metal Nanohole Arrays Made by a Two-Step Replication of Honeycomb Structures of Anodic AluminaScience, 1995
- Initial Stages of Oxide Growth and Pore Initiation in the Porous Anodization of AluminumJournal of the Electrochemical Society, 1976