Ion plating processes: Design criteria and system optimization
- 1 December 1988
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 36 (1-2), 233-242
- https://doi.org/10.1016/0257-8972(88)90153-3
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Effects of Contamination on Langmuir Probe Measurements in Glow Discharge PlasmasJournal of Applied Physics, 1970