Influence of nitrogen incorporation on the electrical properties of MPCVD diamond films growth in CH4–CO2–N2 and CH4–H2–N2 gas mixtures
- 1 October 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 374 (1), 27-33
- https://doi.org/10.1016/s0040-6090(00)01074-9
Abstract
No abstract availableKeywords
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