The structure of silicon nitride films I. Stoichiometric silicon nitride
- 16 December 1978
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 50 (2), 573-578
- https://doi.org/10.1002/pssa.2210500226
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Investigations of mis structure inhomogeneities using a scanning mercury probePhysica Status Solidi (a), 1973
- Electron Diffraction Analysis of the Local Atomic Order in Amorphous FilmsPublished by Elsevier ,1973
- Structure du nitrure de silicium αActa Crystallographica Section B: Structural Science, Crystal Engineering and Materials, 1969
- Thermodynamical Analyses and Experiments for the Preparation of Silicon NitrideJapanese Journal of Applied Physics, 1968
- The structure of amorphous silicon nitride filmsPhysica Status Solidi (b), 1968
- Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] SystemJournal of the Electrochemical Society, 1967