An electroformed CMOS integrated angular rate sensor
- 1 April 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 66 (1-3), 138-143
- https://doi.org/10.1016/s0924-4247(97)01761-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Micromachined gyroscopesSensors and Actuators A: Physical, 1994
- Investigation of attractive forces between PECVD silicon nitride microstructures and an oxidized silicon substrateSensors and Actuators A: Physical, 1992