Investigation of attractive forces between PECVD silicon nitride microstructures and an oxidized silicon substrate
- 29 February 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 30 (3), 231-239
- https://doi.org/10.1016/0924-4247(92)80126-n
Abstract
No abstract availableKeywords
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