Formation of silver trinitride by nitrogen implantation
- 10 July 1988
- journal article
- Published by IOP Publishing in Journal of Physics C: Solid State Physics
- Vol. 21 (19), L683-L687
- https://doi.org/10.1088/0022-3719/21/19/001
Abstract
The formation of AgN3 phase, for the first time, by high-dose nitrogen implantation (2*1018 N cm-2) was confirmed by electron diffraction pattern as well as by the ESCA analysis. A slight shift of the Ag3d3/2 line (373.9 eV) was observed in the ESCA spectrum, indicating that a weak bonding among the Ag and N atoms had formed. The complexity of the orthorhombic structure and the fragility of the bonding are probably the very reasons why the AgN3 phase was difficult to form. However, high-dose implantation can help the kinetics and hence induce the formation of the AgN3 phase in the implanted layer.Keywords
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