Investigation of existing defects and defect generation in device-grade SiO2 by ballistic electron emission spectroscopy
- 1 July 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (4), 1080-1088
- https://doi.org/10.1116/1.589418
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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