Energy Distribution of Sputtered Metastable Ca Atoms
- 23 May 1983
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 50 (21), 1689-1692
- https://doi.org/10.1103/physrevlett.50.1689
Abstract
The energy distribution of sputtered metastable Ca atoms in the sublevel of the lowest-lying triplet state has been measured by Doppler-shift laser-fluorescence spectroscopy. The energy distribution was found to peak at values higher than known for sputtered ground-state atoms. No threshold energy has been found. With increasing oxygen partial pressure the flux of sputtered metastable atoms increased by an order of magnitude; however, the shape of the energy distribution remained unchanged.
Keywords
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