Calorimetric measurement of the average energy of sputtered metal-atoms
- 15 October 1962
- journal article
- Published by Elsevier in Physics Letters
- Vol. 2 (6), 295-296
- https://doi.org/10.1016/0031-9163(62)90046-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion BombardmentJournal of Applied Physics, 1962
- Sputtering of polycrystalline metals by inert gas ions of low energy (100–1000 eV)Physica, 1961
- Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 evJournal of Applied Physics, 1961
- Forces on Ion-Bombarded Electrodes in a Low-Pressure PlasmaJournal of Applied Physics, 1960
- Velocities of Sputtered AtomsPhysical Review B, 1959