Development of a mesoscale/nanoscale plasma generator
- 1 August 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 281-282, 634-636
- https://doi.org/10.1016/0040-6090(96)08707-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- NanotechnologyJournal of Physics E: Scientific Instruments, 1987
- Electrical Breakdown between Close Electrodes in AirJournal of Applied Physics, 1959
- Electrical Breakdown in High VacuumJournal of Applied Physics, 1955