Transmission electron microscopy studies of microstructural evolution, defect structure, and phase transitions in polycrystalline and epitaxial Ti1−xAlxN and TiN films grown by reactive magnetron sputter deposition
- 1 December 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 205 (2), 153-164
- https://doi.org/10.1016/0040-6090(91)90297-b
Abstract
No abstract availableKeywords
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