Development of a plasma immersion ion implanter for the surface treatment of metal components
- 31 October 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 84 (1-3), 537-543
- https://doi.org/10.1016/s0257-8972(95)02792-0
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Advanced surface treatments by plasma ion implantationSurface and Coatings Technology, 1994
- Measurements of potentials and sheath formation in plasma immersion ion implantationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Survey of high-voltage pulse technology suitable for large-scale plasma source ion implantation processesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Sheath development around a high-voltage cathodePlasma Sources Science and Technology, 1994
- Plasma immersion ion implantation—the role of diffusionSurface and Coatings Technology, 1993
- Plasma immersion ion implantation: duplex layers from a single processSurface and Coatings Technology, 1992
- Numerical simulation of plasma sheath expansion, with applications to plasma-source ion implantationJournal of Applied Physics, 1992
- Plasma immersion ion implantation of steelsMaterials Science and Engineering: A, 1991
- Plasma immersion ion implantation using plasmas generated by radio frequency techniquesApplied Physics Letters, 1988
- Plasma source ion-implantation technique for surface modification of materialsJournal of Applied Physics, 1987