Crystallization of Ge and Si in metal films. II
- 1 April 1974
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 45 (4), 1740-1745
- https://doi.org/10.1063/1.1663484
Abstract
Heat treatment of evaporated Si in contact with Ag films and Ge in contact with Al films results in the formation of precipitates of the semiconductor in a metal matrix. The structure of these precipitates was studied by transmission electron microscopy and diffraction (TEMD) and MeV 4He ion channeling techniques. TEMD studies showed that the semiconductor precipitates were crystalline in nature. Channeling techniques showed that the crystallites did not have a simple orientation relationship with the underlying single‐crystal substrate.This publication has 18 references indexed in Scilit:
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