Assembly of Microsystems
- 1 January 2000
- journal article
- Published by Elsevier in CIRP Annals
- Vol. 49 (2), 451-472
- https://doi.org/10.1016/s0007-8506(07)63450-7
Abstract
No abstract availableKeywords
This publication has 35 references indexed in Scilit:
- Batch transfer of microstructures using flip-chip solder bondingJournal of Microelectromechanical Systems, 1999
- Characterization of a novel micromachined optical vibrating rate gyroscopeReview of Scientific Instruments, 1999
- MicroJoinery: concept, definition, and application to microsystem developmentSensors and Actuators A: Physical, 1998
- Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioningJournal of Microelectromechanical Systems, 1998
- Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Microrivets for MEMS packaging: concept, fabrication, and strength testingJournal of Microelectromechanical Systems, 1997
- Surface-micromachined components for articulated microrobotsJournal of Microelectromechanical Systems, 1996
- Micromechanical VelcroJournal of Microelectromechanical Systems, 1992
- Silicon-processed overhanging microgripperJournal of Microelectromechanical Systems, 1992
- Optical rotation of small particles by a circlarly-polarized laser beam in an optical microscope.Journal of the Spectroscopical Society of Japan, 1990