Theoretical Treatment of Ellipsometry

Abstract

Exact expressions are obtained in closed form for the phase and amplitude of the reflected light when a light beam is incident upon a multilayer of a number of homogeneous media. The assumption is made that Maxwell’s equations and Ohm’s law hold. These equations are applied to the special case of dielectric coated metals and the results are compared to ellipsometry measurements made in chromium slides covered with barium stearate films of known thickness. When the conductivity and the dielectric constant of the metal are allowed to assume complex values, and when precautions are taken to reduce the inaccuracy introduced by the residual oxide and gas layer on the metal, the agreement is good.