Resonating microbridge mass flow sensor
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 332-335
- https://doi.org/10.1016/0924-4247(90)85066-d
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Performance of thermally excited resonatorsSensors and Actuators A: Physical, 1990
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990
- Thermally Excited Resonating Membrane Mass Flow SensorSensors and Actuators, 1989
- Lightly-doped polysilicon bridge as a flow meterSensors and Actuators, 1988
- Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon filmsJournal of Applied Physics, 1988
- A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applicationsSensors and Actuators, 1987