The dynamic mechanical characteristics of a resonating microbridge mass-flow sensor
- 30 September 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 29 (1), 37-41
- https://doi.org/10.1016/0924-4247(91)80029-o
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Resonating microbridge mass flow sensor with low-temperature glass-bonded cap waferSensors and Actuators A: Physical, 1991
- The flexural vibration of slightly curved slender beams subject to axial end displacementJournal of Sound and Vibration, 1986
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Silicon as a mechanical materialProceedings of the IEEE, 1982