Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer
- 31 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3), 723-727
- https://doi.org/10.1016/0924-4247(91)87077-g
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonatorsSensors and Actuators A: Physical, 1990
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990
- Thermally Excited Resonating Membrane Mass Flow SensorSensors and Actuators, 1989