High-speed automatic ellipsometer for industrial uses
- 1 September 1976
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (9), 1044-1048
- https://doi.org/10.1063/1.1134814
Abstract
An automatic high‐speed ellipsometer and its practical use are described. The instrument can measure the thickness and optical constants of thin films on materials in 0.03 sec with an accuracy of 0.1°. It has been in use in a factory for about three years and can be used for in situ ellipsometry of evaporated thin films on glass, metal, etc.Keywords
This publication has 4 references indexed in Scilit:
- Ellipsometric Determination of Greasy Layer on AluminumJournal of the Metal Finishing Society of Japan, 1974
- Application of Ellipsometry to the Study of Surface Films on MetalsJournal of the Society of Materials Science, Japan, 1968
- An Automatic Retardation Meter for Automatic Polarimetry by Means of an ADP Polarization ModulatorApplied Optics, 1964
- Automatic Optical Thickness Gauge for Thin Film MeasurementsReview of Scientific Instruments, 1962