Nanometer lithography on silicon and hydrogenated amorphous silicon with low-energy electrons
- 28 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4), 47-50
- https://doi.org/10.1016/0167-9317(94)00053-w
Abstract
No abstract availableKeywords
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