A balanced resonant pressure sensor
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 336-341
- https://doi.org/10.1016/0924-4247(90)85067-e
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- A balanced dual-diaphragm resonant pressure sensor in siliconIEEE Transactions on Electron Devices, 1990
- Resonant silicon structuresSensors and Actuators, 1989
- Wafer bonding for silicon-on-insulator technologiesApplied Physics Letters, 1986
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979
- The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon SubstrateIBM Journal of Research and Development, 1968