C-Nx thin films deposited by pulsed high energy plasma bombardment
- 31 July 1996
- journal article
- Published by Elsevier in Materials Letters
- Vol. 27 (4-5), 125-128
- https://doi.org/10.1016/0167-577x(96)80005-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Room temperature synthesis of cubic boron nitride films by pulse high energy density plasmaJournal of Crystal Growth, 1995
- Observation of crystallinePhysical Review B, 1994
- Structural properties and electronic structure of low-compressibility materials: β- and hypothetical β-Physical Review B, 1990
- Reactive sputtering of carbon and carbide targets in nitrogenJournal of Vacuum Science and Technology, 1979