Characteristics of thin film growth in the synthesis of diamond by chemical vapour deposition and application of the thin film synthesis technology for tools
- 31 December 1988
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 105-106, 525-534
- https://doi.org/10.1016/0025-5416(88)90739-2
Abstract
No abstract availableKeywords
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