Ion implantation of Si, Mg and C into Al0.12Ga0.88N
- 19 May 1997
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 41 (5), 703-706
- https://doi.org/10.1016/s0038-1101(96)00182-7
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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