Control of explosive liquid-phase crystallization of ion-implanted silicon layers by double pulse laser irradiation
- 16 May 1984
- journal article
- structure
- Published by Wiley in Physica Status Solidi (a)
- Vol. 83 (1), K1-K3
- https://doi.org/10.1002/pssa.2210830149
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- The effect of implantation on explosively crystallized a-SiJournal of Applied Physics, 1983
- Explosive Liquid-Phase Crystallization of Thin Silicon Films during Pulse HeatingPhysica Status Solidi (a), 1982
- Explosive Liquid-Phase Crystallization of Ion-Implanted SiliconPhysica Status Solidi (a), 1982
- Explosive crystallization of a-Si films in both the solid and liquid phasesApplied Physics Letters, 1981