Piezoelectric thin films for mems
- 1 September 1997
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 17 (1-4), 297-307
- https://doi.org/10.1080/10584589708013004
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
- Application of lead zirconate titanate thin film displacement sensors for the atomic force microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Fabrication and characterization of PZT thin-film vibrators for micromotorsSensors and Actuators A: Physical, 1995
- Modelling of organometallic chemical vapour deposition of lead titanateJournal of Crystal Growth, 1995
- In-Situ Thin Film Growth of PbTiO3 By Multi Target SputteringMRS Proceedings, 1994
- Electrodes for PbZr x Ti1 − x O 3 Ferroelectric Thin FilmsJournal of the Electrochemical Society, 1993
- Low temperature perovskite formation of lead zirconate titanate thin films by a seeding processJournal of Materials Research, 1993
- High resolution 50 nm linear displacement macroscale meander-line PZT actuatorElectronics Letters, 1993
- Composition-controlled growth of PbTiO3 on SrTiO3 by organometallic chemical vapour depositionJournal of Crystal Growth, 1992
- Deposition of ferroelectric PZT thin films by planar multi-target sputteringFerroelectrics, 1992
- Ferroelectric Film Synthesis, Past and Present: A Select ReviewMRS Proceedings, 1990